# Custom Parts Manufacturing for Semiconductor Equipment

> Vacuum-grade and wafer-handling components machined with cleanliness discipline.

- HTML page: https://fabvector.com/industries/semiconductors (Portuguese: https://fabvector.com/pt/industries/semiconductors)

## Sourcing pain points we solve

Semiconductor equipment is machining at its most unforgiving: on a vacuum sealing surface a single scratch is a virtual leak, and the drawing notes — cleanliness, no cross-seal tool marks, oil-free finishing — are harder than the dimensions. Wafer-handling end effectors live on 0.02–0.05 mm flatness, where a warped part is measured directly in yield. Contamination control extends to material handling itself, including Cu/Zn exclusion zones most shops have never managed. Fleets run for a decade or more, so suppliers must reproduce alpha-build parts as spares years later, from controlled revisions.

## Typical parts

- Vacuum chamber bodies, lids and flanges
- Wafer-handling end effectors and edge grips
- Stage, gantry and motion-platform hardware
- Gas-delivery manifolds and substrate blocks
- PEEK/PTFE wafer-contact components

## Recommended materials

- [aluminum-mic-6](https://fabvector.com/md/materials/aluminum-mic-6)
- [stainless-steel-316l](https://fabvector.com/md/materials/stainless-steel-316l)
- [aluminum-6061](https://fabvector.com/md/materials/aluminum-6061)
- [peek](https://fabvector.com/md/materials/peek)
- [ptfe](https://fabvector.com/md/materials/ptfe)

## Recommended finishes

- [electropolishing](https://fabvector.com/md/finishes/electropolishing)
- [passivation](https://fabvector.com/md/finishes/passivation)
- [anodizing-type-ii](https://fabvector.com/md/finishes/anodizing-type-ii)

## Certifications & standards

- **ISO 9001**: We understand semiconductor OEM supplier audits start at ISO 9001 process discipline and extend into cleanliness and handling procedures.
- **EN 10204 3.1**: We support material traceability with EN 10204 3.1 mill certificates for vacuum and gas-path components where alloy chemistry matters.
- **RoHS / REACH**: We support RoHS/REACH declarations for equipment modules shipping into regulated markets.

_We understand and support these requirements; certification and documentation scope is confirmed per order — we do not claim to hold certifications on this page._

## Buyer questions, answered

### What aluminum is used for semiconductor equipment plates and why?

MIC-6 cast plate for anything where dimensional stability beats strength — stage plates, vacuum chucks, gauge bases — because it arrives stress-relieved and stays flat after machining. 6061-T6 for structural brackets. Swapping one for the other to save cost is how stages drift weeks after acceptance.

### Can machined parts be delivered clean enough for vacuum and cleanroom use?

Yes, when it is specified at RFQ: silicone-free machining, controlled washing, low-outgassing handling and double-bagging are quoted as process steps, not afterthoughts. Electropolished 316L for UHV components is a standard combination on our fab-equipment work.

### What lead time is realistic for fab fixture and chuck spares?

For a tool that is down, days matter: single fixtures in MIC-6 or 6061 can ship in 3–7 days with CMM report. Keeping the drawing and program on file from the first order is what makes the repeat a fast lane instead of a re-quote.