Industry
Semiconductor Equipment
Vacuum-grade and wafer-handling components machined with cleanliness discipline.
FabVector machines Semiconductor Equipment parts in MIC-6 Cast Aluminum Plate, Stainless Steel 316L, Aluminum 6061-T6, from 1 piece, with instant online estimates, engineer-reviewed quotes in 24 hours and NDA-protected files. Delivery with duties handled to the US, Canada, UK and Australia.
- Materials
- MIC-6 Cast Aluminum Plate, Stainless Steel 316L, Aluminum 6061-T6
- Minimum order
- 1 piece
- Estimate
- ~60s online
- Quote
- engineer-reviewed 24h
- IP
- NDA from upload
What slows this industry down
Semiconductor equipment is machining at its most unforgiving: on a vacuum sealing surface a single scratch is a virtual leak, and the drawing notes — cleanliness, no cross-seal tool marks, oil-free finishing — are harder than the dimensions. Wafer-handling end effectors live on 0.02–0.05 mm flatness, where a warped part is measured directly in yield. Contamination control extends to material handling itself, including Cu/Zn exclusion zones most shops have never managed. Fleets run for a decade or more, so suppliers must reproduce alpha-build parts as spares years later, from controlled revisions.
Typical parts we machine
- Vacuum chamber bodies, lids and flanges
- Wafer-handling end effectors and edge grips
- Stage, gantry and motion-platform hardware
- Gas-delivery manifolds and substrate blocks
- PEEK/PTFE wafer-contact components
Recommended materials
MIC-6 Cast Aluminum Plate
The flatness specialist: stress-relieved cast plate that will not move when you machine it.
Stainless Steel 316L
Marine and medical stainless: molybdenum chemistry that shrugs off chlorides and sterilization cycles.
Aluminum 6061-T6
The default CNC aluminum: strong enough for most jobs, machines fast, anodizes well.
PEEK
The polymer that replaces metal: 250 °C service, chemical immunity, implant-grade options.
PTFE (Teflon)
The slipperiest solid known: seals and insulators immune to chemistry and heat alike.
Recommended finishes
Electropolishing
Reverse plating that brightens, deburrs and passivates stainless in one step.
Passivation
Chemical hygiene for stainless: strips embedded iron so the steel can be as stainless as advertised.
Anodizing Type II (Clear)
The standard aluminum finish: hard, clear oxide that keeps the metallic look.
Certifications & standards
- ISO 9001
- We understand semiconductor OEM supplier audits start at ISO 9001 process discipline and extend into cleanliness and handling procedures.
- EN 10204 3.1
- We support material traceability with EN 10204 3.1 mill certificates for vacuum and gas-path components where alloy chemistry matters.
- RoHS / REACH
- We support RoHS/REACH declarations for equipment modules shipping into regulated markets.
We understand and support these requirements; certification and documentation scope is confirmed per order.
Questions semiconductor equipment buyers ask
- What aluminum is used for semiconductor equipment plates and why?
- MIC-6 cast plate for anything where dimensional stability beats strength — stage plates, vacuum chucks, gauge bases — because it arrives stress-relieved and stays flat after machining. 6061-T6 for structural brackets. Swapping one for the other to save cost is how stages drift weeks after acceptance.
- Can machined parts be delivered clean enough for vacuum and cleanroom use?
- Yes, when it is specified at RFQ: silicone-free machining, controlled washing, low-outgassing handling and double-bagging are quoted as process steps, not afterthoughts. Electropolished 316L for UHV components is a standard combination on our fab-equipment work.
- What lead time is realistic for fab fixture and chuck spares?
- For a tool that is down, days matter: single fixtures in MIC-6 or 6061 can ship in 3–7 days with CMM report. Keeping the drawing and program on file from the first order is what makes the repeat a fast lane instead of a re-quote.
Relevant services
CNC Milling
3- and 4-axis vertical machining for housings, brackets, manifolds and structural parts.
5-Axis Machining
Simultaneous 5-axis machining for impellers, freeform surfaces and compound-angle features.
Micro Machining
High-speed spindles and Ø0.1 mm tooling for features below 1 mm and watch-scale parts.
Related engineering guides
CNC machining for semiconductor fixtures
CNC Machining for Semiconductor Fixtures: Clean, Stable and Documented Parts
How to source CNC machined semiconductor fixtures, vacuum plates, wafer handling parts and inspection-ready tooling.
semiconductor vacuum chuck CNC machining
Semiconductor Vacuum Chuck CNC Machining: Flatness, Grooves and Clean Fixtures
Buyer guide for semiconductor vacuum chuck CNC machining: tooling plate selection, vacuum groove geometry, flatness, burr control, cleaning and inspection documents.
semiconductor vacuum fixture CNC machining
Application Case: Semiconductor Vacuum Fixture CNC Machining
A semiconductor vacuum fixture RFQ playbook for aluminum tooling plates, vacuum grooves, flatness, cleaning and inspection documents.
CNC machining service by country
Have a part in mind?
Upload CAD or drawings. Eligible CNC work gets an instant estimate; other processes move to engineer review. NDA-protected from the first byte.
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